- 品名： 貝意克等離子體增強(qiáng)回轉(zhuǎn)PECVD系統(tǒng)
- 型號(hào)： BTF-1200C-R-PECVD
- 產(chǎn)品詳情
- 規(guī)格參數(shù)
主要特點(diǎn)Main features:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
我司研制的回轉(zhuǎn)PECVD系統(tǒng)能使整個(gè)實(shí)驗(yàn)腔體都處于輝光產(chǎn)生區(qū)，輝光均勻等效，這種技術(shù)很好的解決了傳統(tǒng)等離子工作不穩(wěn)定狀態(tài)，這樣離子化的范圍和強(qiáng)度是傳統(tǒng)PECVD的百倍，并解決了物料不均勻堆積現(xiàn)象
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
該款設(shè)備選用特殊形狀(兩頭細(xì)中間粗)的石英管作為化學(xué)氣相沉積的反應(yīng)室;加熱的同時(shí)爐管可360度旋轉(zhuǎn)，管內(nèi)壁有石英擋片幫助粉體材料翻炒有助于燒結(jié)得更均勻;而且爐體可左右大角度傾斜，方便進(jìn)出料，傾斜角度在0~35°可調(diào)。
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
此款設(shè)備現(xiàn)廣泛應(yīng)用于低溫石墨烯制備實(shí)驗(yàn)、粉體材料碳包覆實(shí)驗(yàn)。
技術(shù)參數(shù)Technical Parameters
Furnace加熱爐 | |
Max. Tem**溫度 | 1200℃ |
Heating zone length加熱區(qū)長(zhǎng)度 | 440mm |
Constant zone length恒溫區(qū)長(zhǎng)度 | 200mm |
控溫方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定調(diào)節(jié) l30 programmable segments for precise thermal processing. 智能化30段可編程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超溫和斷偶報(bào)警功能 lOperation interface is 7 "industrial control computer 操作界面為7”工控電腦 |
Heating Elements 加熱元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金） |
Temperature Accuracy 控溫精度 | +/- 1℃ |
Processing tube 爐管 | Size：Φ60*420+Φ100*360+Φ60*420mm 尺寸：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：3~13r/min 爐管轉(zhuǎn)速：3~13r/min |
Furnace body inclination angle | 0~35°（adjustable） |
PE source PE源 | |
Signal frequency信號(hào)頻率 | 13.56 MHz±0.005% |
Power output range功率輸出范圍 | 0-500W |
RF output interface射頻輸出接口 | 50 Ω, N-type, female |
Power stability功率穩(wěn)定性 | ≤5W |
Gas supply system氣路系統(tǒng) | |
High precision mass Flowmeter（Range optional） | 高精度質(zhì)量流量計(jì)（量程可選） |
Accuracy準(zhǔn)確度 | ±1.5% |
Response accuracy響應(yīng)精度
| ·±0.2% |
Response time響應(yīng)時(shí)間
| Gas characteristics：1～4sec 氣特性 Electrical characteristics:10sec 電特性 |
Working pressure difference range工作壓差范圍
| 0.1～0.5MPa |
Max. pressure**壓力
| ·3MPa |
Connection 連接頭類型
| Φ6mmDouble clasp stainless steel joint Φ6mm雙卡套不銹鋼接頭
|
Vacuum unit真空系統(tǒng) | |
KF25 series bellows and manual stopper valves | 采用KF25系列波紋管和手動(dòng)擋板閥 |
Vacuum up to10-1Pa | 真空度可達(dá)10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester | 數(shù)顯真空測(cè)試儀可直觀的顯示數(shù)值 |
